An Off-axis Sputtering System with the specific configuration you described high-temperature heating (up to 800°C), dual angle-adjustable side guns, and four bottom-mounted guns is a sophisticated R&D tool designed for complex thin-film synthesis. - High-Temperature Epitaxy: The substrate heater reaching over 800°C allows for the growth of high-quality crystalline films, such as complex oxides, superconductors (YBCO), or ferroelectrics, which require significant thermal energy for surface diffusion.
- Minimized Plasma Damage: The Off-axis geometry (side-mounted guns) ensures that the substrate is not directly bombarded by high-energy oxygen anions or neutralized argon atoms. This prevents "re-sputtering" and maintains precise stoichiometry.
- Angle-Adjustable Versatility: The side-mounted guns feature adjustable tilt angles, allowing users to optimize the deposition rate and uniformity based on the specific distance and target material.
- Multi-Layer & Co-Sputtering: With 6 total sputter guns (2 off-axis, 4 on-axis), the system can deposit complex multi-layer heterostructures or perform co-sputtering to create new alloys and compounds without breaking vacuum.
- Substrate Stage (Top):
- Equipped with a high-performance Inconel holder with SiC heater capable of 800℃.
 - Often includes a rotation mechanism to ensure thickness uniformity across the wafer.
- Off-axis Sputter Guns (Chamber Sides):
- Two guns mounted at the side of the chamber.
- Equipped with flexible bellows or tilting mounts to adjust the angle relative to the substrate .
- Typically used for the primary functional layers where stoichiometry is critical.
- On-axis Sputter Guns (Bottom):
- Four guns arranged at the base of the chamber facing upward (Up-sputtering).
- Used for high-rate deposition, buffer layers, or metal electrodes where direct plasma exposure is less detrimental.
- Vacuum & Gas Control:
- High-vacuum environment maintained by a Turbo Molecular Pump (TMP).
- Precision Mass Flow Controllers (MFCs) for Ar, O2, or N2 to enable Reactive Sputtering.
|
070-7624-7654
